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KMID : 1059520130570010159
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Journal of the Korean Chemical Society
2013 Volume.57 No. 1 p.159 ~ p.164
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Particle Size Analysis of Chemical Mechanical Polishing (CMP) Powder Using Sedimentation Field-Flow Fractionation (SdFFF)
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Kim Sol
Kim Sun-Tae
Kang Dong-Young
Lee Seung-Ho
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Abstract
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KEYWORD
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Chemical Mechanical Polishing (CMP), Size distribution, Sedimentation field-flow fractionation (SdFFF), Transmission Electron Microscopy (TEM), Dynamic Light Scattering (DLS)
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